Conference Paper 2023

Highly sensitive phase-variation microwave sensor for measuring the thickness of dielectric films on metals with micrometer-scale resolution

2023 IEEE/MTT-S International Microwave Symposium-IMS 2023

Pau Casacuberta Paris Vélez Lijuan Su Jonathan Muñoz-Enano Ferran Martín
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Abstract

This work presents a highly sensitive phase-variation microwave sensor for measuring the thickness of dielectric films on metals with micrometer-scale resolution.

Keywords

Phase-VariationFilm ThicknessMicrometer ResolutionDielectric Films

Key Findings

Technical Achievements

  • ▸ Phase-variation sensing technique
  • ▸ Micrometer-scale resolution
  • ▸ Dielectric film measurement
  • ▸ Metal substrate compatibility

Impact & Applications

  • ▸ High-precision thickness measurement
  • ▸ Industrial quality control
  • ▸ Non-destructive testing
  • ▸ Material characterization

Methodology

Phase Analysis

Development of phase-variation techniques for precise thickness measurement.

High-Resolution Sensing

Implementation of micrometer-scale resolution sensing capabilities.

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